Surface inspection is important for many manufacturing processes in countless industrial and research fields. Today optical measuring methods provide resolutions down to single-digit nanometers. Such depths of field require the use of high resolution nanopositioners.

piezosystem jena’s MIPOS 500 SG is one of the main components of the white light interferometer smartWLI. The MIPOS 500 SG provides a motion range of up to 500 µm and is capable of moving objectives up to 500 grams at a high resonant frequency.

The modells of the white light interferometer smartWLI is an upgrade for optical microscopes. This system is developed and manufactured by GBS mbH, Ilmenau and can fit on all well-known microscope manufacturers, e. g. ZEISS, LEICA, NIKON, OLYMPUS, MT RATHENOW. By using the smartWLI-system, the user can upgrade a common 2D optical microscope to a 3D surface measurement system.